Scanning Electron Microscope (SEM)
The JEOL JSM-6610 SEM is equipped with:
- Backscattered Electron Image (BEI) detector
- Provides simultaneous secondary and backscatter imaging
- Large vacuum chamber: handles 200mm diameter 75mm high samples
- 5-axis tilt/pan motorized stage
- In-chamber video camera
- 30nm resolution, x300,000 magnification
- Control Interface to EDS
