Elemental Analysis by Energy Dispersive X-Ray Spectroscopy (EDS)

Our Scanning Electron Microscope (SEM) is equipped with an Energy Dispersive Spectrometer (EDS) for elemental analysis. The EDS can control the SEM's electron beam, giving the capability of performing measurements on any or all parts of the sample. We can identify the composition of individual particles down to micron size.

Knowing elemental composition improves the accuracy of XRD analysis by narrowing the list of possible "matches" between the sample’s XRD diffractogram and the database of over 400,000 XRD patterns.

Comparison of XRD results (i.e. crystalline material only) and EDS results (elements from all components) allows discussion of possible composition of amorphous (non crystalline) material in a sample. Our EDS can quantify all elements from Carbon (C) to Uranium (U) with a detection threshold of 0.01% by weight. Under ideal conditions, Boron (B) and Beryllium (Be) can also be quantified.