Energy Dispersive X-ray Spectrometer (EDS)

The EDS performs elemental analysis on samples in the SEM. See Elemental Analysis by EDS.

EDS is also known as EDX, EDXS, XEDS, EDXA or EDXMA.

The Oxford Xmax⁵⁰ EDS features:

• large (50mm² compared to the normal 10mm²) Silicon Drift Detector provides enhanced count rates and higher resolution mapping
• with this sensor measurements can be taken with a smaller e^- beam size, minimizing damage to the sample and making focus on smaller particles possible.
• enhanced light element capability: detects beryllium(Be) and quantifies boron (B) and carbon (C)
• solid state peltier cooling for high uptime
• operation at up to 30kV for better discrimination of heavier elements
• improved spectrum processing to reduce false positives, discriminate between elements and quantify trace elements